E SC 211 Material, Safety, and Equipment Overview for Nanotechnology
Course
Objective:
This course provides
an overview of the materials, safety and equipment issues encountered in the
practice of “top down” and “bottom up” nanofabrication. It focuses on
environment, health, and safety (EHS) issues in equipment operation and
materials handling as well as nanofabrication facilities and equipment. Topics to be covered include: cleanroom operation, OSHA
lab standard safety training, health issues, biosafety levels (BSL)
guidelines, and environmental concerns. Specific safety issues dealing with
nanofabrication equipment, materials, and processing will also be discussed
including those pertinent to biological materials, wet benches, thermal
processing tools, plasma based equipment, optical, e-beam, stamping and
embossing lithography tools, vacuum systems and pumps, gas delivery systems
and toxic substance handling and detection. Specific material handling
procedures to be discussed will include corrosive, flammable, and toxic
materials, biological materials, carcinogenic materials, DI water, solvents,
cleaners, photo resists, developers, metals, acids, and bases. The course
will also concentrate on safe and responsible equipment maintenance and
operation. This aspect will be carried out as part of the facilities and
equipment overview.
Current Course
Offering Schedule via C&DE
Semester:
Summer
2012
Day and Time:
NA - Online
Location: NA -
Online
Start Date:
May 14, 2012
End Date:
August 10, 2012
Next
Offerings:
Semester: Fall
2012
Day and Time:
NA - Online
Location: NA -
Online
Start Date:
August 27, 2012
End Date:
December 21, 2012
Course Instructors:
